Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6655808 | Focusing-device for the radiation from a light source | Frank Melzer, Andreas Seifert, Wolfgang Singer | 2003-12-02 |
| 6636367 | Projection exposure device | Ulrich Drodofsky, Nils Dieckmann, Hans-Joachim Miesner | 2003-10-21 |
| 6611574 | Illumination system with reduced heat load | Wolfgang Singer, Wilhelm Ulrich | 2003-08-26 |
| 6535274 | Projection exposure device | — | 2003-03-18 |
| 6438199 | Illumination system particularly for microlithography | Jorg Schultz, Johannes Wangler, Karl-Heinz Schuster, Udo Dinger, Wolfgang Singer | 2002-08-20 |