Issued Patents All Time
Showing 1–25 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10088754 | Illumination system for microlithography | Frank Schlesener, Nils Haverkamp, Vladimir Davydenko, Michael Gerhard, Gerhard-Wilhelm Ziegler +8 more | 2018-10-02 |
| 9753375 | Illumination optical unit for projection lithography | Michael Patra, Frank Schlesener, Manfred Maul, Wolfgang Emer, Stefanie Hilt | 2017-09-05 |
| 9606441 | Illumination system for microlithography | Frank Schlesener, Nils Haverkamp, Vladimir Davydenko, Michael Gerhard, Gerhard-Wilhelm Ziegler +8 more | 2017-03-28 |
| 9575414 | Illumination system for a microlithographic projection exposure apparatus | Johannes Wangler, Heiko Siekmann, Kenneth Weible, Ralf Scharnweber, Manfred Maul +4 more | 2017-02-21 |
| D753576 | Guide rails for a tarpaulin cover of a commercial vehicle | Ali Akbar Burhanidust, Frank Frentzen, Jorg Grunwald, Karl Kemmerling, Rolf Weigelt | 2016-04-12 |
| 9280060 | Illumination system for microlithography | Frank Schlesener, Nils Haverkamp, Vladimir Davydenko, Michael Gerhard, Gerhard-Wilhelm Ziegler +8 more | 2016-03-08 |
| D751024 | Guide rails for a tarpaulin cover of a commercial vehicle | Ali Akbar Burhanidust, Frank Frentzen, Jorg Grunwald, Karl Kemmerling, Rolf Weigelt | 2016-03-08 |
| D750544 | Guide rails for a tarpaulin cover of a commercial vehicle | Ali Akbar Burhanidust, Frank Frentzen, Jorg Grunwald, Karl Kemmerling, Rolf Weigelt | 2016-03-01 |
| 9217930 | Illumination system for a microlithographic projection exposure apparatus | Johannes Wangler, Heiko Siekmann, Kenneth Weible, Ralf Scharnweber, Manfred Maul +4 more | 2015-12-22 |
| 8873023 | Illumination system for microlithography | Frank Schlesener, Nils Haverkamp, Vladimir Davydenko, Michael Gerhard, Gerhard-Wilhelm Ziegler +8 more | 2014-10-28 |
| 8730455 | Illumination system for a microlithographic projection exposure apparatus | Damian Fiolka, Manfred Maul, Markus Deguenther, Johannes Wangler, Vladimir Davydenko | 2014-05-20 |
| 8520307 | Optical integrator for an illumination system of a microlithographic projection exposure apparatus | Oliver Wolf, Heiko Siekmann, Eva Kalchbrenner, Siegfried Rennon, Johannes Wangler +6 more | 2013-08-27 |
| 8513628 | EUV illumination system with a system for measuring fluctuations of the light source | Markus Weiss, Manfred Maul, Philipp Bosselmann | 2013-08-20 |
| 8469436 | Clamping device | Udo Wensing, Hans Boris Hahnen, Frank Neumeyer, Frank Frentzen, Rolf Birkenbach +5 more | 2013-06-25 |
| 8454230 | Method and system for indirect determination of local irradiance in an optical system | Frank Melzer | 2013-06-04 |
| 8403396 | Roller carriage for a sliding bow roof for a truck or truck trailer | Udo Wensing, Hans Boris Hahnen, Frank Neumeyer, Frank Frentzen, Rolf Birkenbach +4 more | 2013-03-26 |
| 8395756 | Illumination system for a microlithographic projection exposure apparatus | Johannes Wangler, Heiko Siekmann, Kenneth Weible, Ralf Scharnweber, Manfred Maul +4 more | 2013-03-12 |
| 8004656 | Illumination system for a microlithographic projection exposure apparatus | Damian Fiolka, Manfred Maul, Vladimir Davydenko, Markus Deguenther, Johannes Wangler | 2011-08-23 |
| 7940375 | Transmission filter apparatus | Damian Fiolka | 2011-05-10 |
| 7880969 | Optical integrator for an illumination system of a microlithographic projection exposure apparatus | Oliver Wolf, Heiko Siekmann, Eva Kalchbrenner, Siegfried Rennon, Johannes Wangler +6 more | 2011-02-01 |
| 7875865 | EUV illumination system with a system for measuring fluctuations of the light source | Markus Weiss, Manfred Maul, Philipp Bosselmann | 2011-01-25 |
| 7847920 | Illumination system and polarizer for a microlithographic projection exposure apparatus | Damian Fiolka, Manfred Maul | 2010-12-07 |
| 7686505 | Method and system for indirect determination of local irradiance in an optical system | Frank Meltzer | 2010-03-30 |
| 7473907 | Illumination system for a wavelength of ≦ 193 nm, with sensors for determining an illumination | Wolfgang Singer, Martin Antoni, Johannes Wangler, Markus Weiss, Vadim Yevgenyevich Banine +5 more | 2009-01-06 |
| 7408622 | Illumination system and polarizer for a microlithographic projection exposure apparatus | Damian Fiolka, Manfred Maul | 2008-08-05 |