Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10444631 | Method of operating a microlithographic projection apparatus and illumination system of such an apparatus | Markus Deguenther, Johannes Eisenmenger, Thomas Korb, Frank Schlesener, Manfred Maul | 2019-10-15 |
| 9910359 | Illumination system of a microlithographic projection exposure apparatus | Markus Deguenther, Vladimir Davydenko, Thomas Korb, Frank Schlesener, Wolfgang Hoegele | 2018-03-06 |
| 9753375 | Illumination optical unit for projection lithography | Axel Scholz, Michael Patra, Frank Schlesener, Manfred Maul, Wolfgang Emer | 2017-09-05 |
| 9500954 | Illumination system of a microlithographic projection exposure apparatus | Markus Deguenther, Vladimir Davydenko, Thomas Korb, Frank Schlesener, Wolfgang Hoegele | 2016-11-22 |
| 9310690 | Illumination system of a microlithographic projection exposure apparatus | Markus Deguenther, Vladimir Davydenko, Thomas Korb, Frank Schlesener, Wolfgang Hoegele | 2016-04-12 |