Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8513628 | EUV illumination system with a system for measuring fluctuations of the light source | Axel Scholz, Markus Weiss, Manfred Maul | 2013-08-20 |
| 7875865 | EUV illumination system with a system for measuring fluctuations of the light source | Axel Scholz, Markus Weiss, Manfred Maul | 2011-01-25 |
| 7473907 | Illumination system for a wavelength of ≦ 193 nm, with sensors for determining an illumination | Wolfgang Singer, Martin Antoni, Johannes Wangler, Markus Weiss, Vadim Yevgenyevich Banine +5 more | 2009-01-06 |