Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8212992 | Device for damping vibrations in projection exposure apparatuses for semiconductor lithography | Peter Kloesch, Markus Weiss | 2012-07-03 |
| 4790699 | Air feed tube assembly for a pneumatic chuck | — | 1988-12-13 |