Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9030644 | Projection exposure apparatus for semiconductor lithography including an actuator system | Benjamin Sigel, Andreas Bertele, Martin Mahlmann, Jochen Weber | 2015-05-12 |
| 8212992 | Device for damping vibrations in projection exposure apparatuses for semiconductor lithography | Michael Ringel, Markus Weiss | 2012-07-03 |