Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7091505 | Collector with fastening devices for fastening mirror shells | Wolfgang Singer, Wilhelm Egle, Joachim Hainz, Joachim Wietzorrek, Johannes Wangler +5 more | 2006-08-15 |
| 7084412 | Collector unit with a reflective element for illumination systems with a wavelength of smaller than 193 nm | — | 2006-08-01 |
| 7015489 | Collector having unused region for illumination systems using a wavelength less than or equal to 193 nm | Wolfgang Singer, Wilhelm Egle, Joachim Hainz, Jochen Wietzorrek, Frank Melzer +1 more | 2006-03-21 |
| 6912077 | Optical system | Ulrich Haag | 2005-06-28 |
| 6836530 | Illumination system with a plurality of individual gratings | Wolfgang Singer, Bernd Kleemann, Karlfried Osterried, Johannes Wangler, Frank Melzer +2 more | 2004-12-28 |