Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11054305 | Method and device for beam analysis | Matthias Manger, Christoph Husemann, Lars Stoppe | 2021-07-06 |
| 10605654 | Method and device for beam analysis | Matthias Manger, Christoph Husemann, Lars Stoppe | 2020-03-31 |
| 10520827 | Optical system, in particular for a microlithographic projection exposure apparatus | Hartmut Enkisch, Thomas Schicketanz, Oliver Dier | 2019-12-31 |
| 10331048 | Mirror, in particular for a microlithographic projection exposure apparatus | Oliver Dier, Kerstin Hild, Hartmut Enkisch | 2019-06-25 |