Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8547551 | Lithographic apparatus and contamination detection method | Anastasius Jacobus Anicetus Bruinsma, Johannes Hubertus Josephina Moors, Lucas Henricus Johannes Stevens, Peter Gerhardus Wilhelmus Bussink, Egbert Anne Martijn Brouwer | 2013-10-01 |
| 7251012 | Lithographic apparatus having a debris-mitigation system, a source for producing EUV radiation having a debris mitigation system and a method for mitigating debris | Vadim Yevgenyevich Banine, Levinus Pieter Bakker, Vladimir Vitalevitch Ivanov, Johannes Hubertus Josephina Moors, Givi Georgievitch Zukavishvili | 2007-07-31 |