Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8547551 | Lithographic apparatus and contamination detection method | Anastasius Jacobus Anicetus Bruinsma, Johannes Hubertus Josephina Moors, Lucas Henricus Johannes Stevens, Abraham Veefkind, Egbert Anne Martijn Brouwer | 2013-10-01 |
| 8514368 | Lithographic apparatus, method for levelling an object, and lithographic projection method | Anastasius Jacobus Anicetus Bruinsma, Hendricus Johannes Maria Meijer | 2013-08-20 |