| 9285690 |
Mirror, lithographic apparatus and device manufacturing method |
Vadim Yevgenyevich Banine, Leonid Aizikovitch Sjmaenok |
2016-03-15 |
| 9261784 |
Lithographic patterning process and resists to use therein |
Sander Frederik Wuister, Vladimir Mihailovitch Krivtsun |
2016-02-16 |
| 9195144 |
Spectral purity filter, radiation source, lithographic apparatus, and device manufacturing method |
Martin Jacobus Johan Jak, Vadim Yevgenyevich Banine, Maarten Marinus Johannes Wilhelmus Van Herpen, Wouter Anthon Soer |
2015-11-24 |
| 9195152 |
Spectral purity filter, lithographic apparatus, and method for manufacturing a spectral purity filter |
Wouter Anthon Soer, Martin Jacobus Johan Jak, Denny Mathew, Hendrik Jan Kettelarij, Fredericus Christiaan Van Den Heuvel +1 more |
2015-11-24 |
| 9046780 |
Multilayer mirror and lithographic apparatus |
— |
2015-06-02 |
| 9007565 |
Spectral purity filter |
Vladimir Mihailovitch Krivtsun, Viacheslav Medvedev, Alexandre Kodentsov |
2015-04-14 |
| 8755032 |
Radiation source and lithographic apparatus |
Vadim Yevgenyevich Banine, Vladimir Vitalevich Ivanov, Erik Roelof Loopstra, Vladimir Mihailovitch Krivtsun, Gerardus Hubertus Petrus Maria Swinkels +1 more |
2014-06-17 |
| 8454849 |
Imprint lithography |
Sander Frederik Wuister, Vadim Yevgenyevich Banine, Arie Jeffrey Den Boef, Yvonne Wendela Kruijt-Stegeman, Tatyana Viktorovna Rakhimova +3 more |
2013-06-04 |
| 8368040 |
Radiation system and lithographic apparatus |
Erik Roelof Loopstra, Vladimir Vitalevich Ivanov, Johannes Hubertus Josephina Moors, Gerardus Hubertus Petrus Maria Swinkels, Dennis De Graaf +1 more |
2013-02-05 |
| 8345223 |
Optical element, lithographic apparatus including such an optical element, device manufacturing method, and device manufactured thereby |
Wouter Anthon Soer, Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors, Maarten Marinus Johannes Wilhelmus Van Herpen |
2013-01-01 |