Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9195152 | Spectral purity filter, lithographic apparatus, and method for manufacturing a spectral purity filter | Wouter Anthon Soer, Andrei Mikhailovich Yakunin, Martin Jacobus Johan Jak, Denny Mathew, Hendrik Jan Kettelarij +1 more | 2015-11-24 |
| 8409996 | Method of manufacturing a bulk acoustic wave device | Frederik Willem Maurits Vanhelmont, Rensinus C. Strijbos, Andreas Bernardus Maria Jansman, Robertus Adrianus Maria Wolters, Johannes Van Wingerden | 2013-04-02 |
| 8343424 | Analysis device with an array of focusing microstructures | Peter Dirksen, Yuri Aksenov, Johannes Arnoldus Jacobus Maria Kwinten | 2013-01-01 |