Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8704199 | Alignment of collector device in lithographic apparatus | Jan Bernard Plechelmus Van Schoot, Sylvain Dutartre | 2014-04-22 |
| 7952685 | Illuminator for a lithographic apparatus and method | Hendrikus Robertus Marie Van Greevenbroek, Bernd Geh, Emil Peter Schmitt-Weaver | 2011-05-31 |
| 7872731 | Lithographic apparatus and device manufacturing method | Hendrikus Robertus Marie Van Greevenbroek, Heine Melle Mulder, Erik Martijn Greijdanus | 2011-01-18 |
| 7538875 | Lithographic apparatus and methods for use thereof | Remco Marcel Van Dijk, Donis Flagello, Tammo Uitterdijk | 2009-05-26 |
| 7375799 | Lithographic apparatus | Marcus Adrianus Van De Kerkhof, Wilhelmus Petrus De Boeij, Hendrikus Robertus Marie Van Greevenbroek, Martijn Gerard Dominique Wehrens, Tammo Uitterdijk | 2008-05-20 |
| 7352443 | Radially polarized light in lithographic apparatus | Laurentius Cornelius De Winter | 2008-04-01 |