Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10948421 | Laser-driven photon source and inspection apparatus including such a laser-driven photon source | Martijn Petrus Christianus Van Heumen, Sergii Denega, Ralph Jozef Johannes Gerardus Anna Maria SMEETS, Marc Van Kemenade | 2021-03-16 |
| 7626684 | Lithographic projection apparatus and a device manufacturing method using such lithographic projection apparatus | Andre Bernardus Jeunink, M'hamed Akhssay, Johannes Jacobus Matheus Baselmans, Franciscus Antonius Chrysogonus Marie Commissaris, Simon De Groot +3 more | 2009-12-01 |
| 7538875 | Lithographic apparatus and methods for use thereof | Donis Flagello, Michel Fransois Hubert Klaassen, Tammo Uitterdijk | 2009-05-26 |
| 7403264 | Lithographic projection apparatus and a device manufacturing method using such lithographic projection apparatus | Andre Bernardus Jeunink, M'hamed Akhssay, Johannes Jacobus Matheus Baselmans, Franciscus Antonius Chrysogonus Marie Commissaris, Simon De Groot +3 more | 2008-07-22 |