Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10948421 | Laser-driven photon source and inspection apparatus including such a laser-driven photon source | Martijn Petrus Christianus Van Heumen, Sergii Denega, Ralph Jozef Johannes Gerardus Anna Maria SMEETS, Remco Marcel Van Dijk | 2021-03-16 |
| 8908152 | Lithographic apparatus and device manufacturing method to determine improved absolute position of exposure fields using mark structures | Franciscus Godefridus Casper Bijnen, Jozef Cornelis Antonius Roijers, Patrick Warnaar, Hoite Pieter Theodoor Tolsma | 2014-12-09 |
| 8711329 | Lithographic apparatus and device manufacturing method | — | 2014-04-29 |
| 8208121 | Alignment mark and a method of aligning a substrate comprising such an alignment mark | Franciscus Godefridus Casper Bijnen, Manfred Gawein Tenner, Patrick Warnaar | 2012-06-26 |