Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10948421 | Laser-driven photon source and inspection apparatus including such a laser-driven photon source | Martijn Petrus Christianus Van Heumen, Sergii Denega, Remco Marcel Van Dijk, Marc Van Kemenade | 2021-03-16 |
| 9357626 | Photon source, metrology apparatus, lithographic system and device manufacturing method | Henricus Petrus Maria Pellemans, Pavel Stanislavovich Antsiferov, Vladimir Mihailovitch Krivtsun, Johannes Matheus Marie De Wit, Gerbrand Van Der Zouw | 2016-05-31 |