Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12354891 | Particle beam inspection apparatus | Jeroen Gerard Gosen, Te-Yu Chen, Dennis Herman Caspar Van Banning, Edwin Cornelis Kadijk, Erheng WANG +1 more | 2025-07-08 |
| 12249480 | Fluid transfer system in a charged particle system | Marcus Adrianus Van De Kerkhof, Jing Zhang, Patriek Adrianus Alphonsus Maria Bruurs, Erheng WANG, Vineet Sharma +4 more | 2025-03-11 |
| 12217930 | Systems and methods for thermally conditioning a wafer in a charged particle beam apparatus | Jeroen Gerard Gosen | 2025-02-04 |
| 11996262 | Fluid transfer system in a charged particle system | Marcus Adrianus Van De Kerkhof, Jing Zhang, Patriek Adrianus Alphonsus Maria Bruurs, Erheng WANG, Vineet Sharma +4 more | 2024-05-28 |
| 11942340 | Particle beam inspection apparatus | Jeroen Gerard Gosen, Te-Yu Chen, Dennis Herman Caspar Van Banning, Edwin Cornelis Kadijk, Erheng WANG +1 more | 2024-03-26 |
| 11804358 | System and methods for thermally conditioning a wafer in a charged particle beam apparatus | Jeroen Gerard Gosen | 2023-10-31 |
| 11764027 | Systems and methods of cooling objective lens of a charged-particle beam system | Jeroen Gerard Gosen, Sven Antoin Johan Hol, Dennis Herman Caspar Van Banning, Naseh Hosseini | 2023-09-19 |
| 11430678 | Particle beam inspection apparatus | Jeroen Gerard Gosen, Te-Yu Chen, Dennis Herman Caspar Van Banning, Edwin Cornelis Kadijk, Erheng WANG +1 more | 2022-08-30 |
| 11139141 | Systems and methods for thermally conditioning a wafer in a charged particle beam apparatus | Jeroen Gerard Gosen | 2021-10-05 |
| 10948421 | Laser-driven photon source and inspection apparatus including such a laser-driven photon source | Sergii Denega, Ralph Jozef Johannes Gerardus Anna Maria SMEETS, Remco Marcel Van Dijk, Marc Van Kemenade | 2021-03-16 |
| 10420197 | Radiation source, metrology apparatus, lithographic system and device manufacturing method | — | 2019-09-17 |
| 9924585 | Radiation source, metrology apparatus, lithographic system and device manufacturing method | — | 2018-03-20 |
| 9913357 | Radiation source, metrology apparatus, lithographic system and device manufacturing method | — | 2018-03-06 |
| 9814126 | Photon source, metrology apparatus, lithographic system and device manufacturing method | — | 2017-11-07 |