Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12147161 | Methods of tuning a model for a lithographic process and associated apparatuses | Pierluigi FRISCO | 2024-11-19 |
| 12078938 | Method and apparatus for predicting aberrations in a projection system | Laurentius Johannes Adrianus Van Bokhoven | 2024-09-03 |
| 11126091 | Measurement apparatus and method for predicting aberrations in a projection system | Martijn Cornelis Schaafsma, James Robert DOWNES | 2021-09-21 |