Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11573496 | Method of reducing effects of lens heating and/or cooling in a lithographic process | Nick Kant | 2023-02-07 |
| 11126091 | Measurement apparatus and method for predicting aberrations in a projection system | Mhamed Akhssay, James Robert DOWNES | 2021-09-21 |