Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12321104 | Substrate holder for use in a lithographic apparatus | Thomas POIESZ, Coen Hubertus Matheus Baltis, Abraham Alexander Soethoudt, Dennis Van Den Berg, Wouter VANESCH +1 more | 2025-06-03 |
| 12189310 | Systems and methods for manufacturing a double-sided electrostatic clamp | Matthew Lipson | 2025-01-07 |
| 12111581 | Method to manufacture nano ridges in hard ceramic coatings | Tammo Uitterdijk, Christopher Mason, Matthew Lipson, David Hart PETERSON, Michael Perry +3 more | 2024-10-08 |
| 11887881 | Lithographic apparatus, substrate table, and non-uniform coating method | Bruce Tirri, Ping Zhou, Elizabeth Stone, David Hart PETERSON, Ryan Mayer +1 more | 2024-01-30 |
| 11448976 | Substrate holder for use in a lithographic apparatus | Thomas POIESZ, Coen Hubertus Matheus Baltis, Abraham Alexander Soethoudt, Dennis Van Den Berg, Wouter VANESCH +1 more | 2022-09-20 |
| 11270906 | Burls with altered surface topography for holding an object in lithography applications | David Hart PETERSON, Tammo Uitterdijk, Michael Perry, Richard B. Lewis, Iliya Sigal | 2022-03-08 |
| 10719019 | Substrate holder and a method of manufacturing a substrate holder | Thomas POIESZ, Satish Achanta, Pavlo ANTONOV, Jeroen BOUWKNEGT, Joost Wilhelmus Maria FRENKEN +4 more | 2020-07-21 |