Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12111581 | Method to manufacture nano ridges in hard ceramic coatings | Mehmet Ali AKBAS, Tammo Uitterdijk, Christopher Mason, Matthew Lipson, Michael Perry +3 more | 2024-10-08 |
| 11887881 | Lithographic apparatus, substrate table, and non-uniform coating method | Bruce Tirri, Ping Zhou, Elizabeth Stone, Mehmet Ali AKBAS, Ryan Mayer +1 more | 2024-01-30 |
| 11422289 | Anti-reflection coating | Parag Vinayak Kelkar | 2022-08-23 |
| 11270906 | Burls with altered surface topography for holding an object in lithography applications | Mehmet Ali AKBAS, Tammo Uitterdijk, Michael Perry, Richard B. Lewis, Iliya Sigal | 2022-03-08 |
| 6824654 | Method of making a cube | Samad M. Edlou | 2004-11-30 |
| 6387602 | Apparatus and method of cleaning reticles for use in a lithography tool | Cindy J. Hayden | 2002-05-14 |