Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11988971 | Lithographic apparatus, substrate table, and method | Matthew Lipson, Satish Achanta, Benjamin David DAWSON, Matthew Anthony Sorna, Tammo Uitterdijk | 2024-05-21 |
| 11520241 | Lithography supports with defined burltop topography | Matthew Lipson, David Heald | 2022-12-06 |
| 11270906 | Burls with altered surface topography for holding an object in lithography applications | Mehmet Ali AKBAS, David Hart PETERSON, Tammo Uitterdijk, Michael Perry, Richard B. Lewis | 2022-03-08 |