Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11988971 | Lithographic apparatus, substrate table, and method | Matthew Lipson, Satish Achanta, Matthew Anthony Sorna, Iliya Sigal, Tammo Uitterdijk | 2024-05-21 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11988971 | Lithographic apparatus, substrate table, and method | Matthew Lipson, Satish Achanta, Matthew Anthony Sorna, Iliya Sigal, Tammo Uitterdijk | 2024-05-21 |