Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10310391 | Electrostatic clamp and a method for manufacturing the same | Matthew Lipson, Ronald Peter Totillo, Tammo Uitterdijk, Steven M. Zimmerman | 2019-06-04 |
| 5155749 | Variable magnification mask for X-ray lithography | John M. Warlaumont | 1992-10-13 |