Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5155749 | Variable magnification mask for X-ray lithography | Vincent Dimilia | 1992-10-13 |
| 4551192 | Electrostatic or vacuum pinchuck formed with microcircuit lithography | Vincent Di Milia, Juan R. Maldonado, James L. Speidell | 1985-11-05 |
| 4436797 | X-Ray mask | Michael John Brady, Bernard S. Meyerson | 1984-03-13 |
| 4405238 | Alignment method and apparatus for x-ray or optical lithography | Warren D. Grobman, David A. Nelson | 1983-09-20 |