Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7843552 | Lithographic apparatus, device manufacturing method, and mask having a pellicle attached hereto | Richard Joseph Bruls, Tammo Uitterdijk, Herman Boom | 2010-11-30 |
| 7379154 | Lithographic apparatus, device manufacturing methods, mask and method of characterizing a mask and/or pellicle | Richard Joseph Bruls, Hendrikus Alphonsus Ludovicus Van Dijck, Gerardus Carolus Johannus Hofmans, Tammo Uitterdijk | 2008-05-27 |