Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11846887 | Prolonging optical element lifetime in an EUV lithography system | Yue Ma, Antonius Theodorus Wilhelmus Kempen, Klaus Hummler, Johannes Hubertus Josephina Moors, Jeroen Hubert Rommers +20 more | 2023-12-19 |
| 11340532 | Prolonging optical element lifetime in an EUV lithography system | Yue Ma, Antonius Theodorus Wilhelmus Kempen, Klaus Hummler, Johannes Hubertus Josephina Moors, Jeroen Hubert Rommers +20 more | 2022-05-24 |
| 7379154 | Lithographic apparatus, device manufacturing methods, mask and method of characterizing a mask and/or pellicle | Richard Joseph Bruls, Orlando Serapio Cicilia, Gerardus Carolus Johannus Hofmans, Tammo Uitterdijk | 2008-05-27 |
| 7221430 | Lithographic apparatus and device manufacturing method | Christian Wagner, Laurentius Catrinus Jorritsma | 2007-05-22 |