Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11668661 | Inspection tool and inspection method | Thomas Jarik HUISMAN, Sander Frederik Wuister, Hermanus Adrianus DILLEN | 2023-06-06 |
| 8119333 | Lithographic method | Eddy Cornelis Antonius Van Der Heijden, Johannes Anna Quaedackers, Hieronymus Johannus Christiaan Meessen, Yin Fong Choi | 2012-02-21 |
| 7992115 | Overlay measurement on double patterning substrate | Eddy Cornelis Antonius Van Der Heijden, Johannes Anna Quaedackers, Hieronymus Johannus Christiaan Meessen, Yin Fong Choi | 2011-08-02 |