Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9964853 | Method of determining dose and focus, inspection apparatus, patterning device, substrate and device manufacturing method | Eric Brouwer, Hugo Augustinus Joseph Cramer, Jan Hendrik Den Besten, Adrianus Franciscus Petrus Engelen, Paul Christiaan Hinnen | 2018-05-08 |
| 9223227 | Inspection apparatus and method, lithographic apparatus, lithographic processing cell and device manufacturing method | Kaustuve Bhattacharyya, Arie Jeffrey Den Boef, Stefan Carolus Jacobus Antonius Keij | 2015-12-29 |
| 9158194 | Metrology method and apparatus, and device manufacturing method | Armand Eugene Albert Koolen, Henricus Petrus Maria Pellemans, Maurits Van Der Schaar, Michael Kubis | 2015-10-13 |
| 8982328 | Method and apparatus for overlay measurement | Henricus Johannes Lambertus Megens, Johannes Anna Quaedackers, Christian Marinus Leewis | 2015-03-17 |
| 8848195 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method for determining a property of a substrate | Christian Marinus Leewis, Marcus Adrianus Van De Kerkhof, Karel Diederick Van Der Mast, Ruben Alvarez Sanchez | 2014-09-30 |
| 8502955 | Method of determining a characteristic | Henricus Johannes Lambertus Megens, Johannes Anna Quaedackers, Christian Marinus Leewis | 2013-08-06 |
| 7443486 | Method for predicting a critical dimension of a feature imaged by a lithographic apparatus | Koen Van Ingen Schenau, Maurice Henricus Franciscus Janssen, Antoine Gaston Marie Kiers, Hans Van Der Laan | 2008-10-28 |