Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9170500 | Lithographic apparatus and device manufacturing method with corrective positioning of reflective element | Jan Bernard Plechelmus Van Schoot, Gosse Charles De Vries | 2015-10-27 |
| 9134629 | Illumination system, lithographic apparatus and method of forming an illumination mode | Erik Roelof Loopstra, Jan Bernard Plechelmus Van Schoot, Christian Wagner, Gosse Charles De Vries | 2015-09-15 |
| 9052605 | Illumination system for lithographic apparatus with control system to effect an adjustment of an imaging parameter | Jan Bernard Plechelmus Van Schoot, Gosse Charles De Vries | 2015-06-09 |
| 8304180 | Lithographic apparatus and device manufacturing method | Johannes Henricus Maria Linders | 2012-11-06 |
| 7736820 | Anti-reflection coating for an EUV mask | Maarten Marinus Johannes Wilhelmus Van Herpen, Vadim Yevgenyevich Banine, Derk Jan Wilfred Klunder | 2010-06-15 |
| 7443486 | Method for predicting a critical dimension of a feature imaged by a lithographic apparatus | Maurice Henricus Franciscus Janssen, Antoine Gaston Marie Kiers, Hans Van Der Laan, Peter Clement Paul Vanoppen | 2008-10-28 |
| 7307687 | Lithographic apparatus, device manufacturing method and substrate | Johannes Anna Quaedackers, Patrick Wong, Michel Franciscus Johannes Van Rooy | 2007-12-11 |
| 7088421 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | — | 2006-08-08 |
| 7042550 | Device manufacturing method and computer program | Martin Lowisch, Marcel Mathijs Theodore Marie Dierichs, Hans Van Der Laan, Martinus Hendrikus Antonius Leenders, Elaine McCoo +1 more | 2006-05-09 |