Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8129097 | Immersion lithography | Dirk De Vries, Richard Moerman, Cédric Désiré Grouwstra | 2012-03-06 |
| 7307687 | Lithographic apparatus, device manufacturing method and substrate | Johannes Anna Quaedackers, Koen Van Ingen Schenau, Patrick Wong | 2007-12-11 |