Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8268518 | Method and lithography device with a mask reflecting light | Hans-Juergen Mann, Wolfgang Singer | 2012-09-18 |
| 7914955 | Masks, lithography device and semiconductor component | Hans-Juergen Mann, Wolfgang Singer | 2011-03-29 |
| 7576934 | Groupwise corrected objective | Michael Schottner, Hans-Jurgen Mann | 2009-08-18 |
| 7572556 | Masks, lithography device and semiconductor component | Hans-Jurgen Mann, Wolfgang Singer | 2009-08-11 |
| 7557902 | Projection objective | Udo Dinger, Frank Eisert, Stefan Koehler, Andreas Ochse, Johannes Zellner +1 more | 2009-07-07 |
| 7042550 | Device manufacturing method and computer program | Marcel Mathijs Theodore Marie Dierichs, Koen Van Ingen Schenau, Hans Van Der Laan, Martinus Hendrikus Antonius Leenders, Elaine McCoo +1 more | 2006-05-09 |