| 10527958 |
Lithographic method |
Patricius Aloysius Jacobus Tinnemans, Edo Maria Hulsebos, Henricus Johannes Lambertus Megens, Sudharshanan Raghunathan, Boris Menchtchikov +13 more |
2020-01-07 |
| 10495986 |
Patterning device cooling system and method of thermally conditioning a patterning device |
Güneş Nakibo{hacek over (g)}lu, Frank Johannes Jacobus Van Boxtel, Jean-Philippe Xavier Van Damme, Richard Johannes Franciscus Van Haren |
2019-12-03 |
| 10474045 |
Lithographic apparatus and device manufacturing method |
Franciscus Godefridus Casper Bijnen, Arie Jeffrey Den Boef, Richard Johannes Franciscus Van Haren, Patricius Aloysius Jacobus Tinnemans, Alexander Ypma +6 more |
2019-11-12 |
| 10394139 |
Patterning device cooling apparatus |
Güneş Nak{dot over (i)}bo{hacek over (g)}lu, Lowell Lane Baker, Ruud Hendrikus Martinus Johannes Bloks, Geoffrey Alan Schultz, Laurentius Johannes Adrianus Van Bokhoven +3 more |
2019-08-27 |
| 10025193 |
Lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product |
Xing Lan Liu, Daan Maurits Slotboom, Wim Tjibbo Tel, Stefan Cornelis Theodorus Van Der Sanden, Richard Johannes Franciscus Van Haren |
2018-07-17 |
| 9879988 |
Metrology method and apparatus, computer program and lithographic system |
Xing Lan Liu, Hendrik Jan Hidde Smilde, Yue-Lin Peng, Josselin Pello, Richard Johannes Franciscus Van Haren |
2018-01-30 |
| 9753377 |
Deformation pattern recognition method, pattern transferring method, processing device monitoring method, and lithographic apparatus |
Irina Lyulina, Manfred Gawein Tenner, Richard Johannes Franciscus Van Haren, Stefan Cornelis Theodorus Van Der Sanden |
2017-09-05 |