Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11782349 | Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus | Weitian Kou, Alexander Ypma, Marc Hauptmann, Michiel Kupers, Lydia Marianna Vergaij-Huizer +8 more | 2023-10-10 |
| 11592753 | Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus | Weitian Kou, Alexander Ypma, Marc Hauptmann, Michiel Kupers, Lydia Marianna Vergaij-Huizer +8 more | 2023-02-28 |
| 11493851 | Lithographic method and lithographic apparatus | Hakki Ergün Cekli, Xing Lan Liu, Richard Johannes Franciscus Van Haren | 2022-11-08 |
| 11327407 | Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus | Weitian Kou, Alexander Ypma, Marc Hauptmann, Michiel Kupers, Lydia Marianna Vergaij-Huizer +8 more | 2022-05-10 |
| 11156923 | Lithographic method and lithographic apparatus | Hakki Ergün Cekli, Xing Lan Liu, Richard Johannes Franciscus Van Haren | 2021-10-26 |
| 11003099 | Method and apparatus for design of a metrology target | Maurits Van Der Schaar, Murat Bozkurt, Patrick Warnaar | 2021-05-11 |
| 10877381 | Methods of determining corrections for a patterning process | Weitian Kou, Alexander Ypma, Marc Hauptmann, Michiel Kupers, Lydia Marianna Vergaij-Huizer +8 more | 2020-12-29 |
| 10437163 | Method and apparatus for design of a metrology target | Maurits Van Der Schaar, Murat Bozkurt, Patrick Warnaar | 2019-10-08 |
| 10025193 | Lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product | Hakki Ergün Cekli, Xing Lan Liu, Daan Maurits Slotboom, Wim Tjibbo Tel, Richard Johannes Franciscus Van Haren | 2018-07-17 |
| 9753377 | Deformation pattern recognition method, pattern transferring method, processing device monitoring method, and lithographic apparatus | Hakki Ergün Cekli, Irina Lyulina, Manfred Gawein Tenner, Richard Johannes Franciscus Van Haren | 2017-09-05 |
| 9291916 | Method of applying a pattern to a substrate, device manufacturing method and lithographic apparatus for use in such methods | Richard Johannes Franciscus Van Haren, Hubertus Johannes Gertrudus Simons, Remi Daniel Marie Edart, Xiuhong Wei, Irina Lyulina +1 more | 2016-03-22 |
| 8976355 | Method of applying a pattern to a substrate, device manufacturing method and lithographic apparatus for use in such methods | Richard Johannes Franciscus Van Haren, Hubertus Johannes Gertrudus Simons, Remi Daniel Marie Edart, Xiuhong Wei, Michael Kubis +1 more | 2015-03-10 |