Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12169366 | Voltage contrast metrology mark | Cyrus E. Tabery, Simon Hendrik Celine Van Gorp, Brennan Peterson | 2024-12-17 |
| 12055904 | Method to predict yield of a device manufacturing process | Youping Zhang, Boris Menchtchikov, Cyrus E. Tabery, Yi Zou, Chenxi Lin +2 more | 2024-08-06 |
| 12044980 | Method of manufacturing devices | Abraham SLACHTER, Wim Tjibbo Tel, Daan Maurits Slotboom, Vadim Yourievich TIMOSHKOV, Koen Wilhelmus Cornelis Adrianus Van Der Straten +7 more | 2024-07-23 |
| 11947266 | Method for controlling a manufacturing process and associated apparatuses | Nicolaas Petrus Marcus Brantjes, Matthijs Cox, Boris Menchtchikov, Cyrus E. Tabery, Youping Zhang +4 more | 2024-04-02 |
| 11803127 | Method for determining root cause affecting yield in a semiconductor manufacturing process | Chenxi Lin, Cyrus E. Tabery, Hakki Ergün Cekli, Boris Menchtchikov, Yi Zou +5 more | 2023-10-31 |
| 11754931 | Method for determining corrections for lithographic apparatus | Roy Werkman, David Deckers, Jeffrey Thomas Ziebarth, Samee Ur Rehman, Davit Harutyunyan +2 more | 2023-09-12 |
| 11714357 | Method to predict yield of a device manufacturing process | Alexander Ypma, Cyrus E. Tabery, Simon Hendrik Celine Van Gorp, Chenxi Lin, Dag Sonntag +9 more | 2023-08-01 |
| 11281110 | Methods using fingerprint and evolution analysis | Jeroen VAN DONGEN, Wim Tjibbo Tel, Sarathi ROY, Yichen Zhang, Andrea Cavalli +1 more | 2022-03-22 |
| 11086229 | Method to predict yield of a device manufacturing process | Alexander Ypma, Cyrus E. Tabery, Simon Hendrik Celine Van Gorp, Chenxi Lin, Dag Sonntag +9 more | 2021-08-10 |
| 11022892 | Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method | Patrick Warnaar, Alberto Da Costa Assafrao, Lukasz Jerzy Macht | 2021-06-01 |
| 10598483 | Metrology method, apparatus and computer program | Sergey Tarabrin, Armand Eugene Albert Koolen | 2020-03-24 |
| 10466594 | Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method | Patrick Warnaar, Alberto Da Costa Assafrao, Lukasz Jerzy Macht | 2019-11-05 |