Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9507279 | Method of operating a lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product | Emil Peter Schmitt-Weaver, Paul Frank Luehrmann, Daan Maurits Slotboom, Jean-Philippe Xavier Van Damme, Wolfgang Henke +2 more | 2016-11-29 |
| 7233384 | Lithographic apparatus and device manufacturing method, and device manufactured thereby for calibrating an imaging system with a sensor | Willem Jurrianus Venema, Anastasius Jacobus Anicetus Bruinsma, Joeri Lof | 2007-06-19 |