Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10884345 | Calibration method for a lithographic apparatus | Emil Peter Schmitt-Weaver, Koenraad Remi André Maria Schreel, Roy Werkman | 2021-01-05 |
| 10627729 | Calibration method for a lithographic apparatus | Emil Peter Schmitt-Weaver, Koenraad Remi André Maria Schreel, Roy Werkman | 2020-04-21 |
| 7310129 | Method for carrying out a double or multiple exposure | Heiko Hommen, Jens Uwe Bruch, Marlene Strobl, Karl-Heinz Schumacher | 2007-12-18 |
| 7268877 | Method and apparatus for orienting semiconductor wafers in semiconductor fabrication | — | 2007-09-11 |
| 7186484 | Method for determining the relative positional accuracy of two structure elements on a wafer | Heiko Hommen, Maria de la Piedad Fernandez-Martinez, Jens Uwe Bruch, Thorsten Schedel | 2007-03-06 |
| 6896999 | Method of exposing a semiconductor wafer in an exposer | Heiko Hommen | 2005-05-24 |
| 6861331 | Method for aligning and exposing a semiconductor wafer | Martin Rössiger, Thorsten Schedel | 2005-03-01 |