Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7186484 | Method for determining the relative positional accuracy of two structure elements on a wafer | Heiko Hommen, Jens Stäcker, Jens Uwe Bruch, Thorsten Schedel | 2007-03-06 |