Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7401549 | Arrangement for transferring information/structures to wafers | Jens Staecker, Uwe Bruch | 2008-07-22 |
| 7310129 | Method for carrying out a double or multiple exposure | Jens Stäcker, Jens Uwe Bruch, Marlene Strobl, Karl-Heinz Schumacher | 2007-12-18 |
| 7245351 | Alignment mark for coarse alignment and fine alignment of a semiconductor wafer in an exposure tool | Diana Mattiza, Holger Hasse | 2007-07-17 |
| 7186484 | Method for determining the relative positional accuracy of two structure elements on a wafer | Jens Stäcker, Maria de la Piedad Fernandez-Martinez, Jens Uwe Bruch, Thorsten Schedel | 2007-03-06 |
| 6979522 | Method for exposing at least one or at least two semiconductor wafers | Ralf Otto, Thorsten Schedel, Sebastian Schmidt, Thomas Fischer | 2005-12-27 |
| 6896999 | Method of exposing a semiconductor wafer in an exposer | Jens Stäcker | 2005-05-24 |
| 6684124 | Method for controlling a processing device for a sequential processing of semiconductor wafers | Thorsten Schedel, Karl-Heinz Schumacher, Thomas Fischer, Ralf Otto, Sebastian Schmidt | 2004-01-27 |