Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7245351 | Alignment mark for coarse alignment and fine alignment of a semiconductor wafer in an exposure tool | Heiko Hommen, Holger Hasse | 2007-07-17 |
| 6980304 | Method for measuring a characteristic dimension of at least one pattern on a disc-shaped object in a measuring instrument | Oliver Broermann, Sebastian Schmidt | 2005-12-27 |