Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7245351 | Alignment mark for coarse alignment and fine alignment of a semiconductor wafer in an exposure tool | Diana Mattiza, Heiko Hommen | 2007-07-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7245351 | Alignment mark for coarse alignment and fine alignment of a semiconductor wafer in an exposure tool | Diana Mattiza, Heiko Hommen | 2007-07-17 |