Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12287591 | Lithographic apparatus, metrology systems, and methods thereof | Arjan Johannes Anton Beukman, Sebastianus Adrianus GOORDEN, Stephen Roux, Filippo ALPEGGIANI | 2025-04-29 |
| 11762305 | Alignment method | Filippo ALPEGGIANI, Sebastianus Adrianus GOORDEN, Simon Reinald HUISMAN | 2023-09-19 |
| 11703771 | Variable diffraction grating | Ali ALSAQQA, Fadi El-Ghussein, Lambertus Gerardus Maria Kessels, Roxana Rezvani Naraghi, Krishanu SHOME +1 more | 2023-07-18 |
| 11474435 | Metrology sensor, illumination system and method of generating measurement illumination with a configurable illumination spot diameter | Sebastianus Adrianus GOORDEN, Simon Reinald HUISMAN | 2022-10-18 |
| 11181828 | Method of determining a value of a parameter of interest of a patterning process, device manufacturing method | Patrick Warnaar, Hilko Dirk Bos, Hendrik Jan Hidde Smilde, Mohammadreza Hajiahmadi, Lukasz Jerzy Macht +2 more | 2021-11-23 |
| 11150563 | Method of measuring a parameter of a patterning process, metrology apparatus, target | Sergey Tarabrin, Su-Ting CHENG, Armand Eugene Albert Koolen, Markus Franciscus Antonius Eurlings, Koenraad Remi André Maria Schreel | 2021-10-19 |
| 11022899 | Method of measuring a focus parameter relating to a structure formed using a lithographic process | Fahong Li | 2021-06-01 |
| 10831107 | Method for of measuring a parameter relating to a structure formed using a lithographic process | Jin LIAN | 2020-11-10 |
| 10788757 | Metrology method and apparatus, computer program and lithographic system | Su-Ting CHENG, Armand Eugene Albert Koolen | 2020-09-29 |
| 4301402 | Electrical measuring circuit | Mikhail M. Galkin, Marat I. Kornienko, Boris P. Podboronov, Anatoly V. Furman | 1981-11-17 |
| 4190776 | Multipoint measuring device | Boris P. Podboronov, Anatoly V. Furman | 1980-02-26 |