Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12326670 | Lithographic apparatus, metrology system, and intensity imbalance measurement for error correction | Earl William Ebert | 2025-06-10 |
| 11703771 | Variable diffraction grating | Ali ALSAQQA, Fadi El-Ghussein, Lambertus Gerardus Maria Kessels, Krishanu SHOME, Timothy A. Brunner +1 more | 2023-07-18 |