Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12287591 | Lithographic apparatus, metrology systems, and methods thereof | Arjan Johannes Anton Beukman, Sebastianus Adrianus GOORDEN, Stephen Roux, Sergei Sokolov | 2025-04-29 |
| 12025925 | Metrology method and lithographic apparatuses | Henricus Petrus Maria Pellemans, Sebastianus Adrianus GOORDEN, Simon Reinald HUISMAN | 2024-07-02 |
| 11762305 | Alignment method | Sergei Sokolov, Sebastianus Adrianus GOORDEN, Simon Reinald HUISMAN | 2023-09-19 |