Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12379670 | Substrate, patterning device and metrology apparatuses | Mattia Marelli | 2025-08-05 |
| 12112260 | Metrology apparatus and method for determining a characteristic of one or more structures on a substrate | Lorenzo Tripodi, Patrick Warnaar, Grzegorz Grzela, Farzad Farhadzadeh, Patricius Aloysius Jacobus Tinnemans +5 more | 2024-10-08 |
| 12105432 | Metrology method and associated computer product | Narjes JAVAHERI, Maurits Van Der Schaar, Tieh-Ming Chang, Hilko Dirk Bos, Patrick Warnaar +3 more | 2024-10-01 |
| 11448974 | Metrology parameter determination and metrology recipe selection | Narjes JAVAHERI, Olger Victor Zwier, Gonzalo Roberto Sanguinetti | 2022-09-20 |
| 11181828 | Method of determining a value of a parameter of interest of a patterning process, device manufacturing method | Patrick Warnaar, Hilko Dirk Bos, Hendrik Jan Hidde Smilde, Lukasz Jerzy Macht, Karel Hendrik Wouter VAN DEN BOS +2 more | 2021-11-23 |
| 11009345 | Metrology method, apparatus, and computer program to determine a representative sensitivity coefficient | Alberto Da Costa Assafrao | 2021-05-18 |
| 10990020 | Metrology parameter determination and metrology recipe selection | Narjes JAVAHERI, Olger Victor Zwier, Gonzalo Roberto Sanguinetti | 2021-04-27 |
| 10794693 | Metrology method, apparatus and computer program | Farzad Farhadzadeh, Maurits Van Der Schaar, Murat Bozkurt | 2020-10-06 |
| 10705437 | Metrology method and apparatus, computer program and lithographic system | Narjes JAVAHERI, Murat Bozkurt, Alberto Da Costa Assafrao, Marc Johannes Noot, Simon Gijsbert Josephus Mathijssen +1 more | 2020-07-07 |
| 10481506 | Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method | Murat Bozkurt, Maurits Van Der Schaar, Patrick Warnaar, Martin Jacobus Johan Jak, Grzegorz Grzela +1 more | 2019-11-19 |
| 10451978 | Metrology parameter determination and metrology recipe selection | Kaustuve Bhattacharyya, Simon Gijsbert Josephus Mathijssen, Marc Johannes Noot, Arie Jeffrey Den Boef, Farzad Farhadzadeh | 2019-10-22 |