Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10588211 | Radiation source having debris control | Rolf Theodorus Nicolaas Beijsens, Kornelis Frits Feenstra, Arjen Teake De Jong, Reinier Theodorus Martinus Jilisen, Andrey Nikipelov +3 more | 2020-03-10 |
| 9964852 | Source collector apparatus, lithographic apparatus and method | Denis Alexandrovich Glushkov, Ronald Johannes Hultermans, Benedictus Mathijs Renkens, Gerardus Hubertus Petrus Maria Swinkels, Christiaan Johannes Petrus Verspeek | 2018-05-08 |
| 9841680 | Source collector apparatus, lithographic apparatus and method | Denis Alexandrovich Glushkov, Ronald Johannes Hultermans, Benedictus Mathijs Renkens, Gerardus Hubertus Petrus Maria Swinkels, Christiaan Johannes Petrus Verspeek | 2017-12-12 |
| 9835950 | Radiation source | Markus Franciscus Antonius Eurlings, Antonius Johannes Josephus Van Dijsseldonk, Ramon Mark Hofstra, Oscar Franciscus Jozephus Noordman, Tien Nang Pham +3 more | 2017-12-05 |