Issued Patents All Time
Showing 1–25 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7630060 | Device manufacturing method, lithographic apparatus and device manufactured thereby | Joost Jeroen Ottens, Levinus Pieter Bakker, Wilhelmus Josephus Box, Jan Van Elp, Frank Jeroen Pieter Schuurmans | 2009-12-08 |
| 7505116 | Lithographic apparatus and device manufacturing method | George Arie Jan Fockert, Hans Van Der Laan | 2009-03-17 |
| 7499149 | Holographic mask for lithographic apparatus and device manufacturing method | Bernardus Hendrikus Wilhelmus Hendriks | 2009-03-03 |
| 7492443 | Device manufacturing method, device manufactured thereby and a mask for use in the method | Erik Roelof Loopstra, Hans Meiling, Johannes Hubertus Josephina Moors, Martinus Hendrikus Antonius Leenders | 2009-02-17 |
| 7459690 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Mark Kroon, Wilhelmus Cornelis Keur, Vadim Yevgenyevich Banine, Hans Van Der Laan, Johannes Hubertus Josephina Moors +1 more | 2008-12-02 |
| 7453577 | Apparatus and method for inspecting a patterned part of a sample | Arie Jeffrey Den Boef, Cristian Nicolae Presura | 2008-11-18 |
| 7309869 | Lithographic apparatus, device manufacturing method and radiation system | Ralph Kurt, Levinus Pieter Bakker, Frank Jeroen Pieter Schuurmans | 2007-12-18 |
| 7307712 | Method of detecting mask defects, a computer program and reference substrate | Auke Jan Mud | 2007-12-11 |
| 7283236 | Alignment system and lithographic apparatus equipped with such an alignment system | Cristian Nicolae Presura | 2007-10-16 |
| 7277185 | Method of measuring overlay | Rene Monshouwer, Jacobus Hermanus Maria Neijzen | 2007-10-02 |
| 7105837 | Lithographic apparatus, device manufacturing method and radiation system | Ralph Kurt, Levinus Pieter Bakker, Frank Jeroen Pieter Schuurmans | 2006-09-12 |
| 7095499 | Method of measuring alignment of a substrate with respect to a reference alignment mark | Rene Monshouwer, Jacobus Hermanus Maria Neijzen | 2006-08-22 |
| 7075620 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Mark Kroon, Wilhelmus Cornelis Keur, Vadim Yevgenyevich Banine, Hans Van Der Laan, Johannes Hubertus Josephina Moors +1 more | 2006-07-11 |
| 7012673 | Lithographic apparatus and device manufacturing method | Aleksey Yurievich Kolesnychenko | 2006-03-14 |
| 6963391 | Lithographic apparatus and device manufacturing method | George Arie Jan Fockert, Hans Van Der Laan | 2005-11-08 |
| 6937334 | Method of measuring alignment of a substrate with respect to a reference alignment mark | Rene Monshouwer, Jacobus Hermanus Maria Neijzen | 2005-08-30 |
| 6937344 | Method of measuring overlay | Rene Monshouwer, Jacobus Hermanus Maria Neijzen | 2005-08-30 |
| 6888151 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Mark Kroon, Haico Victor Kok | 2005-05-03 |
| 6879374 | Device manufacturing method, device manufactured thereby and a mask for use in the method | Erik Roelof Loopstra, Hans Meiling, Johannes Hubertus Josephina Moors, Martinus Hendrikus Antonius Leenders | 2005-04-12 |
| 6747282 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Mark Kroon, Haico Victor Kok | 2004-06-08 |
| 6721389 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Mark Kroon, Wilhelmus Cornelis Keur, Vadim Yevgenyevich Banine, Hans Van Der Laan, Johannes Hubertus Josephina Moors +1 more | 2004-04-13 |
| 6122058 | Interferometer system with two wavelengths, and lithographic apparatus provided with such a system | Philippe J. L. Belien, Johannes C. N. Rijpers | 2000-09-19 |
| 6046792 | Differential interferometer system and lithographic step-and-scan apparatus provided with such a system | Peter Dirksen | 2000-04-04 |
| 5917604 | Alignment device and lithographic apparatus provided with such a device | Peter Dirksen, Manfred Gawein Tenner | 1999-06-29 |
| 5910847 | Method of determining the radiation dose in a lithographic apparatus | Peter Dirksen, Manfred Gawein Tenner | 1999-06-08 |