Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5674650 | Method of repetitively imaging a mask pattern on a substrate, and apparatus for performing the method | Peter Dirksen | 1997-10-07 |
| 5673101 | Method of repetitively imaging a mask pattern on a substrate, and apparatus for performing the method | Manfred Gawein Tenner, Cornelis M. J. Van Uijen, Peter Dirksen | 1997-09-30 |
| 5485272 | Radiation-source unit for generating a beam having two directions of polarisation and two frequencies | Peter Dirksen, Manfred Gawein Tenner | 1996-01-16 |
| 5191200 | Imaging apparatus having a focus-error and/or tilt detection device | Marinus Aart Van Den Brink, Henk F. D. Linders, Johannes Marcus Maria Beltman | 1993-03-02 |
| 5026166 | Apparatus for pre-aligning substrate preparatory to fine alignment | — | 1991-06-25 |
| 4866262 | Optical imaging arrangement comprising an opto-electronic focussing-error detection system | Johannes W. M. Biesterbos | 1989-09-12 |
| 4749278 | Arrangement for aligning a mask and a substrate relative to each other | — | 1988-06-07 |
| 4253019 | Apparatus for reading an optical record carrier having a radiation-reflecting information structure | Willem G. Opheij | 1981-02-24 |