Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8264664 | Method for producing a marker on a substrate, lithographic apparatus and device manufacturing method | Maurits Van Der Schaar, Jacobus Burghoorn, Richard Johannes Franciscus Van Haren, Everhardus Cornelis Mos | 2012-09-11 |
| 7633618 | Method and apparatus for measuring the relative position of a first and a second alignment mark | — | 2009-12-15 |
| 7476490 | Method for producing a marker on a substrate, lithographic apparatus and device manufacturing method | Maurits Van Der Schaar, Jacobus Burghoorn, Richard Johannes Franciscus Van Haren, Everhardus Cornelis Mos | 2009-01-13 |
| 7345739 | Lithographic alignment system and device manufacturing method | Robert Hendriks, Egbert Lenderink, Alexander Marc Van Der Lee, Gert Wim 'T Hooft | 2008-03-18 |
| 7312846 | Lithographic apparatus and device manufacturing method | Jacobus Hermanus Maria Neijzen | 2007-12-25 |
| 7277185 | Method of measuring overlay | Jacobus Hermanus Maria Neijzen, Jan Evert Van Der Werf | 2007-10-02 |
| 7095499 | Method of measuring alignment of a substrate with respect to a reference alignment mark | Jacobus Hermanus Maria Neijzen, Jan Evert Van Der Werf | 2006-08-22 |
| 6937334 | Method of measuring alignment of a substrate with respect to a reference alignment mark | Jacobus Hermanus Maria Neijzen, Jan Evert Van Der Werf | 2005-08-30 |
| 6937344 | Method of measuring overlay | Jacobus Hermanus Maria Neijzen, Jan Evert Van Der Werf | 2005-08-30 |
| 6803993 | Lithographic apparatus and device manufacturing method | Jacobus Hermanus Maria Neijzen | 2004-10-12 |