Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7046331 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Marinus Aart Van Den Brink, Richard Alexander George | 2006-05-16 |
| 6879866 | Method, computer program product and apparatus for scheduling maintenance actions in a substrate processing system | Wim Tjibbe Tel, Suzan Leonie Auer-Jongepier | 2005-04-12 |